MEMS at Bosch – Si plasma etch success story, history, applications, and products - Laermer - 2019 - Plasma Processes and Polymers - Wiley Online Library
Bosch Process | samco-ucp ltd.
Illustration of Bosch Process - YouTube
![Illustration of the trenching in the Bosch etching process [45,47].... | Download Scientific Diagram](https://www.researchgate.net/publication/335158462/figure/fig6/AS:791632442032130@1565751290673/Illustration-of-the-trenching-in-the-Bosch-etching-process-45-47.png "Illustration of the trenching in the Bosch etching process [45,47].... | Download Scientific Diagram")
Illustration of the trenching in the Bosch etching process [45,47].... | Download Scientific Diagram
Deep silicon etching using alternated etch process
4.7.2 Simple Bosch Process Simulation
File:DRIE Bosch process.png - Wikipedia
![PDF] An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/083532114f924ae9108979cedfa14c79a57c2006/2-Figure1-1.png "PDF] An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon | Semantic Scholar")
PDF] An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon | Semantic Scholar
What is the Bosch Process (Deep Reactive Ion Etching)? - Samco Inc.
Smooth silicon sidewall etching for waveguide structures using a modified Bosch process
![PDF] DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/68fb3e62e37aa40e82e5daf9f529291343e81a98/4-Figure2-1.png "PDF] DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process | Semantic Scholar")
PDF] DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process | Semantic Scholar
Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena: Vol 26, No
High Aspect Ratio Deep Trench Etching
Bosch polymer removal comparison | nanoFAB
Smooth silicon sidewall etching for waveguide structures using a modified Bosch process
7.2.1 Important MEMS Processes
DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process - ScienceDirect
Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography | Microsystems & Nanoengineering
.jpg "3D Nanopatterning and Nanofabrication: Using Nano-Scalloping Effects in Bosch Deep Reactive Ion Etching")
3D Nanopatterning and Nanofabrication: Using Nano-Scalloping Effects in Bosch Deep Reactive Ion Etching
MEMS at Bosch – Si plasma etch success story, history, applications, and products - Laermer - 2019 - Plasma Processes and Polymers - Wiley Online Library
A multi-step etch method for fabricating slightly tapered through-silicon vias based on modified Bosch process | SpringerLink
Through silicon via profile metrology of Bosch etching process based on spectroscopic reflectometry - ScienceDirect
